JPH03104742U - - Google Patents

Info

Publication number
JPH03104742U
JPH03104742U JP12472689U JP12472689U JPH03104742U JP H03104742 U JPH03104742 U JP H03104742U JP 12472689 U JP12472689 U JP 12472689U JP 12472689 U JP12472689 U JP 12472689U JP H03104742 U JPH03104742 U JP H03104742U
Authority
JP
Japan
Prior art keywords
prober
pair
test head
rotary table
elastic members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12472689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639450Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12472689U priority Critical patent/JPH0639450Y2/ja
Publication of JPH03104742U publication Critical patent/JPH03104742U/ja
Application granted granted Critical
Publication of JPH0639450Y2 publication Critical patent/JPH0639450Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12472689U 1989-10-25 1989-10-25 Ｌｓｉテスタ Expired - Lifetime JPH0639450Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12472689U JPH0639450Y2 (ja) 1989-10-25 1989-10-25 Ｌｓｉテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12472689U JPH0639450Y2 (ja) 1989-10-25 1989-10-25 Ｌｓｉテスタ

Publications (2)

Publication Number Publication Date
JPH03104742U true JPH03104742U (en]) 1991-10-30
JPH0639450Y2 JPH0639450Y2 (ja) 1994-10-12

Family

ID=31672631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12472689U Expired - Lifetime JPH0639450Y2 (ja) 1989-10-25 1989-10-25 Ｌｓｉテスタ

Country Status (1)

Country Link
JP (1) JPH0639450Y2 (en])

Also Published As

Publication number Publication date
JPH0639450Y2 (ja) 1994-10-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term